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Nanofabrication Section

Contact PersonIDEUE, Toshiya
Contact PersonHASHISAKA, Masayuki
Contact PersonMIWA, Shinji
Contact PersonSHIMAZAKI, Yuya
Assistant ProfessorENDO, Akira
Technical Specialist HASHIMOTO, Yoshiaki

Our goal is to promote solid-state physics research by fabricating novel materials into micro- or nanoscale devices and linking them to various advanced measurement technologies at ISSP. The laboratory staff is available for consultation on fabrication processes and provides advice and training to users.

Nanofabrication Section

Main Facility

Electron beam lithography system, Focused ion beam processing system, photolithography system, various deposition system, etc.