Taniuchi Group

member
Project Associate Professor TANIUCHI, Toshiyuki
Project Research Associate FUJIWARA Hirokazu

Research Subjects

  • Developments of high-resolution photoemission electron microscopy (laser-PEEM) and related techniques
  • Inspection and measurement of semiconductor materials and devices using laser-PEEM
  • Realization of high-resolution non-destructive imaging for soft materials
  • Fundamental physics on low energy excited photoelectrons

Our laboratory conducts research utilizing next-generation measurement technologies, centered on Laser-excited Photoemission Electron Microscopy (Laser-PEEM) and related techniques. Laser-PEEM is an advanced microscopy method capable of visualizing the diverse physical and chemical properties in nanomaterials at high resolution. Leveraging its high throughput and relatively large detection depth, it enables the non-destructive observation of nanoscale properties within complex structures—such as semiconductor devices and multilayer nanostructures—that have traditionally been difficult to analyze with conventional electron microscopies. We emphasize applying this technology not only to fundamental science but also to directly addressing industrial challenges. Specifically, we focus on implementing solutions for inspection needs in the semiconductor industry and visualizing chemical states in soft materials. Our goal is to achieve societal implementation across diverse fields—from physics and chemistry to environmental science, biology, and medicine—to create innovative value.

Laser-excited photoemission electron microscope (Laser-PEEM) developed at the Institute for Solid State Physics
Features of Laser PEEM: chemical contrast, high throughput, non-destructive observation, high resolution

Publications and Research Highlights